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Co-authors
(8)
Sang Heup Moon
28
Jae-Ho Min
22
Sung-Wook Hwang
19
Jin-Kwan Lee
9
Byeong-Ok Cho
6
Journals
(6)
J VAC SCI TECHNOL A
14
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
9
SURF COAT TECH
2
ELECTROCHEM SOLID STATE LETT
1
KOREAN J CHEM ENG
1
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Authors
Gyeo-Re Lee
Gyeo-Re Lee,Seoul National University,Electrical & Electronic Engineering
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Gyeo-Re Lee
Seoul National University
Publications:
28
|
Citations:
115
Fields:
Electrical & Electronic Engineering
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Collaborated with
8 co-authors
from 2000 to 2007
|
Cited by
114 authors
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Annual
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Publications
(28)
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Angular dependence of Si[sub 3]N[sub 4] etch rates and the etch selectivity of SiO[sub 2] to Si[sub 3]N[sub 4] at different bias voltages in a high-density C[sub 4]F[sub 8] plasma
Jin-Kwan Lee
,
Gyeo-Re Lee
,
Jae-Ho Min
,
Sang Heup Moon
Journal:
Journal of Vacuum Science & Technology A - J VAC SCI TECHNOL A
, vol. 25, no. 5, 2007
Angular distribution of particles sputtered from Si bottom in a CHFâ plasma
(
Citations: 4
)
Jin-Kwan Lee
,
Gyeo-Re Lee
,
Jae-Ho Min
,
Sang Heup Moon
Journal:
Journal of Vacuum Science & Technology A - J VAC SCI TECHNOL A
, vol. 24, no. 5, pp. 1807-1811, 2006
Dependence of SiO[sub 2] etch rate on sidewall angle as affected by bottom materials in a high-density CHF[sub 3] plasma
Gyeo-Re Lee
,
Jae-Ho Min
,
Jin-Kwan Lee
,
Sang Heup Moon
Journal:
Journal of Vacuum Science & Technology B - J VAC SCI TECHNOL B
, vol. 24, no. 1, 2006
Contribution of bottom-emitted radicals to the deposition of a film on the SiO2 sidewall during CHF3 plasma etching
(
Citations: 5
)
Gyeo-Re Lee
,
Jae-Ho Min
,
Jin-Kwan Lee
,
Se-Koo Kang
,
Sang Heup Moon
Journal:
Journal of Vacuum Science & Technology A - J VAC SCI TECHNOL A
, vol. 23, no. 4, pp. 713-719, 2005
Improvement of SiO 2 pattern profiles etched in CF 4 and SF 6 plasmas by using a Faraday cage and neutral beams
(
Citations: 3
)
Jae-Ho Min
,
Gyeo-Re Lee
,
Jin-kwan Lee
,
Chang-Koo Kim
,
Sang Heup Moon
Journal:
Surface & Coatings Technology - SURF COAT TECH
, vol. 193, no. 1, pp. 75-80, 2005
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Citations
(115 times by 49 publications)
Oxygen plasma damage to blanket and patterned ultralow-κ surfaces
J. Bao
,
H. Shi
,
H. Huang
,
P. S. Ho
,
M. L. McSwiney
,
M. D. Goodner
,
M. Moinpour
,
G. M. Kloster
Journal:
Journal of Vacuum Science & Technology A - J VAC SCI TECHNOL A
, vol. 28, no. 2, 2010
Effect of energetic ions on plasma damage of porous SiCOH low-k materials
E. Kunnen
,
M. R. Baklanov
,
A. Franquet
,
D. Shamiryan
,
T. V. Rakhimova
,
A. M. Urbanowicz
,
H. Struyf
,
W. Boullart
Journal:
Journal of Vacuum Science & Technology B - J VAC SCI TECHNOL B
, vol. 28, no. 3, 2010
A nontransferring dry adhesive with hierarchical polymer nanohairs
(
Citations: 22
)
H. E. Jeong
,
J.-K. Lee
,
H. N. Kim
,
S. H. Moon
,
K. Y. Suh
Journal:
Proceedings of The National Academy of Sciences - PNAS
, vol. 106, no. 14, pp. 5639-5644, 2009
Dependence of photoresist surface modifications during plasma-based pattern transfer on choice of feedgas composition: Comparison of C[sub 4]F[sub 8]- and CF[sub 4]-based discharges
(
Citations: 2
)
S. Engelmann
,
R. L. Bruce
,
F. Weilnboeck
,
M. Sumiya
,
T. Kwon
,
R. Phaneuf
,
G. S. Oehrlein
,
C. Andes
,
D. Graves
,
D. Nest
,
E. A. Hudson
Journal:
Journal of Vacuum Science & Technology B - J VAC SCI TECHNOL B
, vol. 27, no. 3, 2009
Cyclic Deposition/Etching Process to Etch a Bowing-Free SiO[sub 2] Contact Hole
(
Citations: 1
)
Jin-Kwan Lee
,
Il-Yong Jang
,
Seung-Haeng Lee
,
Chang-Koo Kim
,
Sang Heup Moon
Journal:
Journal of The Electrochemical Society - J ELECTROCHEM SOC
, vol. 156, no. 8, 2009
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