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Co-authors
(10)
Genshu Fuse
1
Yozo Fujino (藤野陽)
1
Hiroshi Muro-Oka
1
T. Yagita
1
Michiro Sugitani
1
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NUCL INSTRUM METH PHYS RES B
1
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Authors
T. Siraishi
T. Siraishi,Physics,Electrical & Electronic Engineering
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T. Siraishi
Publications:
1
|
Citations:
1
Fields:
Physics
,
Electrical & Electronic Engineering
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Collaborated with
10 co-authors
in 2005
|
Cited by
5 authors
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Publications
(1)
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Electrical characteristics due to differences in crystal damage induced by various implant conditions
(
Citations: 1
)
G. Fuse
,
M. Sano
,
H. Murooka
,
T. Yagita
,
M. Kabasawa
,
T. Siraishi
,
Y. Fujino
,
N. Suetsugu
,
H. Kariya
,
H. Izutani
,
M. Sugitani
Journal:
Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms - NUCL INSTRUM METH PHYS RES B
, vol. 237, no. 1, pp. 77-82, 2005
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Citations
(1 time by 1 publication)
Evaluation of Pre-Amorphized Layer Thickness and Interface Quality of High-Dose Shallow Implanted Silicon by Spectroscopic Ellipsometry
(
Citations: 1
)
Satoshi Shibata
,
Fumitoshi Kawase
,
Akihiko Kitada
,
Takashi Kouzaki
,
Akira Kitamura
Journal:
IEEE Transactions on Semiconductor Manufacturing - IEEE TRANS SEMICONDUCT MANUF
, vol. 23, no. 4, pp. 545-552, 2010
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