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Co-authors
(5)
Kazuhiro Hane
4
Jun Mizuno
1
Takayuki Tokuda
1
Masafumi Kimata
1
Toshiyuki Takagi
1
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SENSOR ACTUATOR A-PHYS
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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Authors
Hoang Manh Chu
Hoang Manh Chu,Tohoku University,Electrical & Electronic Engineering,Medicine,Aeronautics & Aerospace Engineering
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Hoang Manh Chu
Tohoku University
Publications:
4
|
Citations:
4
Fields:
Electrical & Electronic Engineering
,
Medicine
,
Aeronautics & Aerospace Engineering
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Collaborated with
5 co-authors
from 2010 to 2011
|
Cited by
5 authors
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Publications
(4)
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Design, fabrication and vacuum operation characteristics of two-dimensional comb-drive micro-scanner
(
Citations: 1
)
Hoang Manh Chu
,
Kazuhiro Hane
Journal:
Sensors and Actuators A-physical - SENSOR ACTUATOR A-PHYS
, vol. 165, no. 2, pp. 422-430, 2011
Compact slanted comb two-axis micro-mirror scanner fabricated by silicon-on-insulator micromachining
Hoang Manh Chu
,
Jun Mizuno
,
Kazuhiro Hane
,
Toshiyuki Takagi
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
, vol. 29, 2011
Compact Low-Voltage Operation Micromirror Based on High-Vacuum Seal Technology Using Metal Can
(
Citations: 3
)
Hoang Manh Chu
,
Takayuki Tokuda
,
Masafumi Kimata
,
Kazuhiro Hane
Journal:
IEEE/ASME Journal of Microelectromechanical Systems - J MICROELECTROMECHANICAL SYST
, vol. 19, no. 4, pp. 927-935, 2010
Vacuum operation characteristics of two-dimensional micro-mirror
Hoang Manh Chu
,
Kazuhiro Hane
Conference:
IEEE/LEOS International Conference on Optical - MEMS
, 2010
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Citations
(4 times by 3 publications)
Design, fabrication, and vacuum package process for high performance of 2D scanning MEMS micromirror
H. M. Chu
,
T. Sasaki
,
K. Hane
Conference:
International Conference on Solid State Sensors and Actuators - TRANSDUCERS
, pp. 558-561, 2011
Vacuum operation characteristics of two-dimensional micro-mirror
Hoang Manh Chu
,
Kazuhiro Hane
Conference:
IEEE/LEOS International Conference on Optical - MEMS
, 2010
Motion Estimation And Compensation In SAR/ISAR Imaging
H. Yang
,
M. Soumekh
Conference:
Multidimensional Signal Processing Workshop - MDSP
, 1991
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