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Co-authors
(17)
Gottlieb S. Oehrlein
5
Rod W. Boswell
3
Miles M. Turner
3
Y.-H. Zhang
3
M. Haverlag
2
Conferences
(1)
ICOPS
4
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(2)
J VAC SCI TECHNOL A
6
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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Authors
David Vender
David Vender,Electrical & Electronic Engineering
Edit
David Vender
Publications:
12
|
Citations:
20
Fields:
Electrical & Electronic Engineering
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Collaborated with
17 co-authors
from 1991 to 2002
|
Cited by
72 authors
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Annual
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Publications
(12)
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Collisionless heating by capacitive radio frequency sheaths
G. Gozadinos
,
M. M. Turner
,
D. Vender
Conference:
IEEE International Conference on Plasma Science - ICOPS
, 2002
Experimental investigation of power deposition and ionization kinetics in an inductively coupled discharge
W. Rullenraad
,
B. Crowley
,
M. M. Turner
,
D. Vender
Conference:
IEEE International Conference on Plasma Science - ICOPS
, 2000
Kinetic simulation of positive column instabilities
M. M. Turner
,
D. Vender
Conference:
IEEE International Conference on Plasma Science - ICOPS
, 2000
Negative ions in a CCl2F2 radio frequency discharge
(
Citations: 3
)
E. Stoffels
,
W. W. Stoffels
,
D. Vender
,
G. M. W. Kroesen
,
F. J. de Hoog
Journal:
Journal of Vacuum Science & Technology A - J VAC SCI TECHNOL A
, vol. 13, no. 4, pp. 2051-2057, 1995
Sidewall passivation during the etching of poly-Si in an electron cyclotron resonance plasma of HBr
(
Citations: 7
)
M. Haverlag
,
G. S. Oehrlein
,
D. Vender
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
, vol. 12, no. 1, pp. 96-101, 1994
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Citations
(20 times by 20 publications)
Cold Atmospheric Plasma: Charged Species and Their Interactions With Cells and Tissues
(
Citations: 15
)
Eva Stoffels
,
Yukinori Sakiyama
,
David B. Graves
Journal:
IEEE Transactions on Plasma Science - IEEE TRANS PLASMA SCI
, vol. 36, no. 4, pp. 1441-1457, 2008
Electron Beams in Capacitively Coupled Radio-Frequency Discharges
Julian Schulze
,
Brian G. Heil
,
Dirk Luggenholscher
,
Uwe Czarnetzki
Journal:
IEEE Transactions on Plasma Science - IEEE TRANS PLASMA SCI
, vol. 36, no. 4, pp. 1400-1401, 2008
Plasma Ionization in Low-Pressure Radio-Frequency Discharges—Part II: Particle-in-Cell Simulation
A. Meige
,
D. O'Connell
,
T. Gans
,
R. W. Boswell
Journal:
IEEE Transactions on Plasma Science - IEEE TRANS PLASMA SCI
, vol. 36, no. 4, pp. 1384-1385, 2008
Particle in Cell Simulation of Low Temperature Laboratory Plasmas
(
Citations: 3
)
K. Matyash
,
R. Schneider
,
F. Taccogna
,
A. Hatayama
,
S. Longo
,
M. Capitelli
,
D. Tskhakaya
,
F. X. Bronold
Journal:
Contributions To Plasma Physics - CONTRIB PLASM PHYS
, vol. 47, no. 8-9, pp. 595-634, 2007
Etching of ruthenium coatings in O[sub 2]- and Cl[sub 2]-containing plasmas
(
Citations: 4
)
C. C. Hsu
,
J. W. Coburn
,
D. B. Graves
Journal:
Journal of Vacuum Science & Technology A - J VAC SCI TECHNOL A
, vol. 24, no. 1, 2006
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