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Co-authors
(54)
Marius Chemla
6
David M. Levy
4
Rene Erre (René Erre)
4
Francois Rouelle (François Rouelle)
4
Valerie Bertagna (Valérie Bertagna)
4
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Authors
S. Petitdidier
S. Petitdidier,Mechanical Engineering
Edit
S. Petitdidier
Publications:
9
|
Citations:
12
Fields:
Mechanical Engineering
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Collaborated with
54 co-authors
from 2001 to 2009
|
Cited by
52 authors
Cumulative
Annual
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Publications
(9)
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RefWorks
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Key Process steps for high reliable SiOCH low-k dielectrics for the sub 45nm technology nodes
M. Vilmay
,
D. Roy
,
C. Besset
,
D. Galpin
,
C. Monget
,
P. Vannier
,
Y. Le Friec
,
G. Imbert
,
M. Mellier
,
S. Petitdidier
,
O. Robin
,
J. Guillan
http://academic.research.microsoft.com/io.ashx?type=5&id=50760457&selfId1=49213966&selfId2=0&maxNumber=12&query=
Conference:
Interconnect Technology, IEEE International Conference - IITC
, 2009
Manufacturability and Speed Performance Demonstration of Porous ULK (k=2.5) for a 45nm CMOS Platform
(
Citations: 1
)
E. Richard
,
R. Fox
,
C. Monget
,
M. Zaleski
,
P. Ferreira
,
A. Guvenilir
,
P. Brun
,
E. Oilier
,
M. Guillermet
,
M. Mellier
,
S. Petitdidier
,
R. Delsol
http://academic.research.microsoft.com/io.ashx?type=5&id=50582377&selfId1=49213966&selfId2=0&maxNumber=12&query=
Conference:
VLSI Technology, Symposium - VLSIT
, 2007
Growth mechanism and characterization of chemical oxide films produced in peroxide mixtures on Si(100) surfaces
(
Citations: 1
)
S. Petitdidier
,
V. Bertagna
,
N. Rochat
,
D. Rouchon
,
P. Besson
,
R. Erre
,
M. Chemla
Journal:
Thin Solid Films
, vol. 476, no. 1, pp. 51-58, 2005
Bias voltage dependent electrochemical impedance spectroscopy of p- and n-type silicon substrates
(
Citations: 2
)
M. Chemla
,
J. F. Dufrêche
,
I. Darolles
,
F. Rouelle
,
D. Devilliers
,
S. Petitdidier
,
D. Lévy
Journal:
Electrochimica Acta - ELECTROCHIM ACTA
, vol. 51, no. 4, pp. 665-676, 2005
Silicon surface wet cleaning and chemical oxide growth by a novel treatment in aqueous chlorine solutions
(
Citations: 2
)
M. Chemla
,
S. Durand-Vidal
,
S. Zanna
,
S. Petitdidier
,
D. Levy
Journal:
Electrochimica Acta - ELECTROCHIM ACTA
, vol. 49, no. 21, pp. 3545-3553, 2004
Sort by:
Citations
(12 times by 11 publications)
Deposition of silica thin films formed by sol–gel method
(
Citations: 1
)
Hasan Guleryuz
,
Ingeborg Kaus
,
Claudine Filiàtre
,
Tor Grande
,
Mari-Ann Einarsrud
Journal:
Journal of Sol-gel Science and Technology - J SOL-GEL SCI TECHNOL
, vol. 54, no. 2, pp. 249-257, 2010
Elucidating the Conductivity-Type Transition Mechanism of p-Type Cu[sub 2]O Films from Electrodeposition
Jun-Nan Nian
,
Chien-Cheng Tsai
,
Pao-Chung Lin
,
Hsisheng Teng
Journal:
Journal of The Electrochemical Society - J ELECTROCHEM SOC
, vol. 156, no. 7, 2009
Design and CAD for 3D integrated circuits
(
Citations: 3
)
Paul D. Franzon
,
W. Rhett Davis
,
Michael B. Steer
,
Steve Lipa
,
Eun Chu Oh
,
Thor Thorolfsson
,
Samson Melamed
,
Sonali Luniya
,
Tad Doxsee
,
Stephen Berkeley
,
Ben Shani
,
Kurt Obermiller
Conference:
Design Automation Conference - DAC
, pp. 668-673, 2008
Complete Removal of Copper Contaminants on Bare Silicon Surfaces by Use of HCN Aqueous Solutions
(
Citations: 1
)
Hiroaki Narita
,
Masao Takahashi
,
Hitoo Iwasa
,
Hikaru Kobayashi
Journal:
Journal of The Electrochemical Society - J ELECTROCHEM SOC
, vol. 155, no. 2, 2008
Degenerate Si as an Electrode Material for Electrochemical Biosensors
(
Citations: 1
)
Yin Huang
,
Ian Ivar Suni
Journal:
Journal of The Electrochemical Society - J ELECTROCHEM SOC
, vol. 155, no. 12, 2008
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