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Co-authors
(3)
Takeshi Kamata Goto
1
Hiroshi Arimoto
1
Mitsugu Tajima
1
Conferences
(1)
eMDC
1
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Authors
Fukashi Harada
Fukashi Harada,Engineering
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Fukashi Harada
Publications:
1
|
Citations:
3
Fields:
Engineering
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Collaborated with
3 co-authors
in 2003
|
Cited by
11 authors
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Annual
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Publications
(1)
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Advanced process control for 40 nm gate fabrication
(
Citations: 3
)
Mitsugu Tajima
,
Hiroshi Arimoto
,
Takeshi K. Goto
,
Fukashi Harada
Conference:
IEEE International Symposium on Semiconductor Manufacturing - eMDC
, pp. 115-118, 2003
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Citations
(3 times by 3 publications)
Advanced CD Control Technology for 65-nm Node Dual Damascene Process
Masatoshi Nagase
,
Takuya Maruyama
,
Makoto Sekine
Journal:
IEEE Transactions on Semiconductor Manufacturing - IEEE TRANS SEMICONDUCT MANUF
, vol. 20, no. 3, pp. 245-251, 2007
Development of equipment-installed APC system and critical dimension control technology of gate-hard-mask etching using its system
(
Citations: 3
)
Shin-ichi Imai
,
Asaki Sano
,
Manabu Fujimoto
Conference:
IEEE International Symposium on Semiconductor Manufacturing - eMDC
, 2005
Improvements in polysilicon etch bias and transistor gate control with module level APC methodologies
(
Citations: 2
)
David A. Williams
,
Aaron R. Locander
,
Ted Herrera
,
John D. Garza
,
Cynthia K. Parker
Journal:
IEEE Transactions on Semiconductor Manufacturing - IEEE TRANS SEMICONDUCT MANUF
, vol. 18, no. 4, pp. 522-527, 2005
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