Sign in
Author
|
Conference
|
Journal
|
Organization
|
Year
|
DOI
Look for results that meet for the following criteria:
since
equal to
before
between
and
Search in all fields of study
Limit my searches in the following fields of study
Agriculture Science
Arts & Humanities
Biology
Chemistry
Computer Science
Economics & Business
Engineering
Environmental Sciences
Geosciences
Material Science
Mathematics
Medicine
Physics
Social Science
Multidisciplinary
Co-authors
(15)
Timothy J. Wiltshire
1
Emma Y. Hwang
1
Christopher K. Ober
1
Karen K. Gleason
1
Peter Nguyen
1
Conferences
(1)
ASMC
1
Journals
(1)
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
1
Keywords
(6)
Embed
Subscribe
Academic
Authors
Nelson M. Felix
Nelson M. Felix,IBM,Electrical & Electronic Engineering
Edit
Nelson M. Felix
IBM
Publications:
2
|
Citations:
5
Fields:
Electrical & Electronic Engineering
View FAQ about top research areas and Fields of study
Collaborated with
15 co-authors
from 2004 to 2011
|
Cited by
23 authors
Cumulative
Annual
Sort by:
Publications
(2)
BibTeX
|
RIS
|
RefWorks
Download
Advanced overlay control in volume manufacturing
Timothy Wiltshire
,
Christopher Ausschnitt
,
Nelson Felix
,
Emily Hwang
,
Michael Pike
,
Allen Gabor
,
Moshe Preil
,
Vincent Couraudon
,
James Schreiber
,
Timon Fliervoet
,
Geert Simons
,
Erica Rottenkolber
Conference:
Advanced Semiconductor Manufacturing, IEEE/SEMI Conference and Workshop - ASMC
, pp. 1-6, 2011
Towards all-dry lithography: Electron-beam patternable poly(glycidyl methacrylate) thin films from hot filament chemical vapor deposition
(
Citations: 5
)
Yu Mao
,
Nelson M. Felix
,
Peter T. Nguyen
,
Christopher K. Ober
,
Karen K. Gleason
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
, vol. 22, no. 5, 2004
Sort by:
Citations
(5 times by 5 publications)
Chemical Vapor Deposition of Conformal, Functional, and Responsive Polymer Films
(
Citations: 2
)
Mahriah E. Alf
,
Ayse Asatekin
,
Miles C. Barr
,
Salmaan H. Baxamusa
,
Hitesh Chelawat
,
Gozde Ozaydin-Ince
,
Christy D. Petruczok
,
Ramaswamy Sreenivasan
,
Wyatt E. Tenhaeff
,
Nathan J. Trujillo
,
Sreeram Vaddiraju
,
Jingjing Xu
http://academic.research.microsoft.com/io.ashx?type=5&id=39430954&selfId1=53246703&selfId2=0&maxNumber=12&query=
Journal:
Advanced Materials - ADVAN MATER
, vol. 22, no. 18, pp. 1993-2027, 2009
Initiated and Oxidative Chemical Vapor Deposition of Polymeric Thin Films: iCVD and oCVD
(
Citations: 24
)
Wyatt E. Tenhaeff
,
Karen K. Gleason
Journal:
Advanced Functional Materials - ADV FUNCT MATER
, vol. 18, no. 7, pp. 979-992, 2008
A Directly Patternable, Click-Active Polymer Film via Initiated Chemical Vapor Deposition
(
Citations: 4
)
Sung Gap Im
,
Byeong-Su Kim
,
Long Hua Lee
,
Wyatt E. Tenhaeff
,
Paula T. Hammond
,
Karen K. Gleason
Journal:
Macromolecular Rapid Communications - MACROMOL RAPID COMMUN
, vol. 29, no. 20, pp. 1648-1654, 2008
Nanoscale Pattern Definition on Nonplanar Surfaces Using Ion Beam Proximity Lithography and Conformal Plasma-Deposited Resist
(
Citations: 1
)
Dhara Parikh
,
Barry Craver
,
Hatem N. Nounu
,
Fu-On Fong
,
John C. Wolfe
Journal:
IEEE/ASME Journal of Microelectromechanical Systems - J MICROELECTROMECHANICAL SYST
, vol. 17, no. 3, pp. 735-740, 2008
Positive and Negative-Tone CVD Polyacrylic Electron-Beam Resists Developable by Supercritical CO2
(
Citations: 5
)
Y. Mao
Journal:
Chemical Vapor Deposition - CHEM VAPOR DEPOSITION
, vol. 12, no. 5, pp. 259-262, 2006
Comments