Sign in
Author
|
Conference
|
Journal
|
Organization
|
Year
|
DOI
Look for results that meet for the following criteria:
since
equal to
before
between
and
Search in all fields of study
Limit my searches in the following fields of study
Agriculture Science
Arts & Humanities
Biology
Chemistry
Computer Science
Economics & Business
Engineering
Environmental Sciences
Geosciences
Material Science
Mathematics
Medicine
Physics
Social Science
Multidisciplinary
Co-authors
(7)
Steven F. Roth
1
Hugh James Byrne
1
N. S. Parekh
1
Sujal Parikh
1
James Gardner
1
Conferences
(1)
ICSM
1
Journals
(2)
CHEM PETROL ENG-ENGL TR
1
Thin Solid Films
1
Embed
Subscribe
Academic
Authors
L. Yu. Aksel'rod
L. Yu. Aksel'rod,Chemical Engineering,Manufacturing Technology,Mechanical Engineering
Edit
L. Yu. Aksel'rod
Publications:
3
|
Citations:
2
Fields:
Chemical Engineering
,
Manufacturing Technology
,
Mechanical Engineering
View FAQ about top research areas and Fields of study
Collaborated with
7 co-authors
from 1979 to 1998
|
Cited by
14 authors
Cumulative
Annual
Sort by:
Publications
(3)
BibTeX
|
RIS
|
RefWorks
Download
TiN barrier integrity and volcano formation in W-plug applications
(
Citations: 2
)
S. Parikh
,
L Akselrod
,
J Gardner
,
Karl Armstrong
,
N Parekh
Journal:
Thin Solid Films
, vol. 320, no. 1, pp. 26-30, 1998
A spectroscopic analysis of photochemical processes in fullerenes
L. Akselrod
,
H. J. Byrne
,
C. Thomsen
,
S. Roth
Conference:
International Conference on Science and Technology of Synthetic Metals - ICSM
, 1994
Solid particle flow on the floor of a rotary cyclone chamber
L. Yu. Aksel'rod
Journal:
Chemical and Petroleum Engineering - CHEM PETROL ENG-ENGL TR
, vol. 15, no. 6, pp. 438-441, 1979
Sort by:
Citations
(2 times by 2 publications)
Investigation of Static Corrosion Between W Metals and TiN[sub x] Barriers in a W Chemical-Mechanical-Polishing Slurry
Chi-Cheng Hung
,
Ying-Lang Wang
,
Wen-Hsi Lee
,
Shih-Chieh Chang
Journal:
Journal of The Electrochemical Society - J ELECTROCHEM SOC
, vol. 155, no. 7, 2008
Characterizations of Pulsed Chemical Vapor Deposited-Tungsten Thin Films for Ultrahigh Aspect Ratio W-Plug Process
(
Citations: 5
)
Soo-Hyun Kim
,
Eui-Sung Hwang
,
Seung-Chul Ha
,
Seung-Ho Pyi
,
Ho-Jung Sun
,
Joo-Wan Lee
,
Nohjung Kawk
,
Jun-Ki Kim
,
Hyunchul Sohn
,
Jinwoong Kim
Journal:
Journal of The Electrochemical Society - J ELECTROCHEM SOC
, vol. 152, no. 6, 2005
Comments