,Fused Silica,fused silicas,fusing silica

Fused Silica is the material of choice for UV optical systems such as the projection optics in microlithography systems. Unfortunately fused silica is not stable under UV irradition and undergoes compaction and color center formation. The UV damage properties of fused silica have been the subject of a number of studies. The detailed microscopic mechanism for color center formation is complex and remains obscure but the fact that compaction must be a generic property of a glassy system seems to have been overlooked by most researchers although Krajnovich, et...

G. Gallatin. Mechanism of Laser Induced Compaction