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Conferences (129)

Journals (214)

Keywords (87)

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Surface Micromachining

,Surface Micromachining,surface micromachined,surface micromachin,surface micromachines,surface micromachine,surface micromachinings,surface micromach

Surface Micromachining

Publications: 3,069| Citation Count: 20,580

Stemming Variations: surface micromachined, surface micromachin, surface micromachines, surface micromachine, surface micromachinings

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Publications (3069)

Two-cavity MEMS variable capacitor for power harvesting

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Journal: Journal of Micromechanics and Microengineering - J MICROMECHANIC MICROENGINEER , vol. 22, no. 6, 2012

Large range MEMS motion detection using integrated piezo-resistive silicon nanowire

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Conference: IEEE International Conference on Micro Electro Mechanical Systems - MEMS , pp. 1320-1323, 2012

MEMS magnetic field sensor based on magnetoelectric composites

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Journal: Journal of Micromechanics and Microengineering - J MICROMECHANIC MICROENGINEER , vol. 22, no. 6, 2012

Fabrication and characterization of a multidirectional-sensitive contact-enhanced inertial microswitch with a electrophoretic flexible composite fixed electrode

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Journal: Journal of Micromechanics and Microengineering - J MICROMECHANIC MICROENGINEER , vol. 22, no. 4, 2012

A multidirectional-sensitive inertial microswitch with electrophoretic polymer-metal composite fixed electrode for flexible contact

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Conference: IEEE International Conference on Micro Electro Mechanical Systems - MEMS , pp. 504-507, 2012