Piezoresistive Cantilever for Mechanical Force Sensors

Piezoresistive Cantilever for Mechanical Force Sensors,T. Chu Duc,J. F. Creemer,P. J. F. Swart,P. M. Sarro

Piezoresistive Cantilever for Mechanical Force Sensors  
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This paper describes piezoresistive cantilever force sensors that are used to evaluate the impact force between micro- handling tools and microparticles in the nano-Newton range. The 500 nm-thick piezoresistive sensors are made from epitaxial silicon on single crystal silicon. This cantilever is based on conventional silicon wafers and fabricated using bulk micromachining. The cantilevers are 300-500 µm long, 10-20 µm high, and 10-18 µm wide. The applied force on this sensor is parallel to wafer surface. This structure can eliminate the effect of the vertical force, increasing the sensitivity and accuracy of the system. The force sensitivity of implemented sensors ranges from 150 to 300 V/N. The force resolution estimated at 6 nN.
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