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Hydrogen Gas Sensing Using a Pd-Coated Cantilever

Hydrogen Gas Sensing Using a Pd-Coated Cantilever,10.1143/JJAP.39.3584,Japanese Journal of Applied Physics,Sumio Okuyama,Yuichi Mitobe,Katsuro Okuyama

Hydrogen Gas Sensing Using a Pd-Coated Cantilever   (Citations: 9)
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A cantilever consisting of a thin glass plate coated with an evaporated Pd thin film can be utilized as a hydrogen gas sensor because the Pd film expands upon absorption of hydrogen, resulting in the bending of the free end of the cantilever. A comparison has been made between the response obtained experimentally from 100-1000-nm-thick Pd-coated glass plate cantilevers in the presence of 0.1-600 Torr hydrogen and the response calculated from the data of the Pd lattice expansion due to hydrogen absorption and the elasticity theory. It is shown that the Pd-coated cantilever can detect hydrogen at least from 0.1 to 10 Torr with good reproducibility. The use of a Pd-Ag alloy film instead of a pure Pd film was found to be effective both in enhancing the hydrogen sensitivity at low hydrogen pressures and in extending the hydrogen responsivity up to 600 Torr.
Journal: Japanese Journal of Applied Physics , vol. 39, no. Part 1, No, pp. 3584-3590, 2000
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    • ...The absorption-induced stress leads to hydrogen-concentration-dependent cantilever bending, which can be determined by means of optical beam deflection [2], [3], capacitance- [4]–[6], or piezo-resistance- [7] based readout...

    S. V. Phamet al. Read-Out of Cantilever Bending With a Grated Waveguide Optical Cavity

    • ...Microcantilever-based sensors can be used to detect molecular absorption of, for example, hydrogen gas, which causes changes in the surface stress [1-7], leading to deflection of the cantilever...
    • ...Such a deflection can be determined by means of optical beam deflection [2], capacitance- [3], or piezo-resistance- [4] based readout...
    • ...Absorption of H2 by Pd will cause the cantilever to curl down [3-5], which narrows the GWG-cantilever gap, g, and leads to a stronger interaction between the cantilever and the GWG evanescent modal field, which results in a shift of the transmission spectrum...

    S. V. Phamet al. A novel mechano-optical sensor based on read-out with a Si3N4 grated w...

    • ...This temperature variation is typically addressed by either thermal regulation, or data post-processing to correct for the error [3, 4]. Bare reference cantilevers are commonly used in capacitive cantilever sensors to account for process variation, changes in the dielectric constant, and to eliminate parasitic capacitance from the system [4]...
    • ...relates to the thermal expansion coefficients metal α , Si α , as [3]:...
    • ...determined experimentally and has been shown to have values between 0.01-0.19 [3]...

    Robert C. Robertset al. Microfabricated differential-mode gas sensor utilizing temperature com...

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