CO-sensing properties of undoped and doped tin oxide thin films prepared by electron beam evaporation

Undoped thin films of tin oxide and those doped with indium oxide and nickel oxides were deposited by electron beam evaporation. The effects of the film thickness and preparation conditions (films prepared with or without the presence of oxygen environment during deposition) on the optical and carbon monoxide sensing properties of the films were studied. The films were characterized using X-ray diffraction and X-ray photoelectron spectroscopy and optical spectroscopy techniques. All the films were found to be amorphous. It was found that the sensitivity of the films to CO increased with the thickness and the porosity of the films. It was found that their selectivity to CO gas relative to CO2 and SO2 gases could be improved upon doping the films with indium (or nickel) oxide.

...Tin oxide based semiconductor gas sensors have been widely used for detection of the environmentally hazardous pollutant gases in general and carbon monoxide gas in particular [1-6]...
...Film parameters that are widely known to affect the sensing properties of a thin film are surface roughness, stoichiometry, grain size, structure (amorphous or polycrystalline), and porosity [1-6]...
...Moreover while studying the effects of the film thickness and preparation conditions (films prepared with or without the presence of oxygen environment during deposition) on the optical and carbon monoxide sensing properties of the films it was shown that the CO-sensing properties strongly depend on the film thickness and preparation conditions [1]...
...It was found that the Sensitivity (S) measured at a given temperature, in addition to other film preparation conditions (films prepared with or without the presence of oxygen environment during deposition, film thickness, porosity, electrode metals and configuration [1, 10]) also strongly depends on the sensor biasing voltage...
...Figure 2 shows sensitivity dependence on the sensor bias voltage for SnO2 sensor of thickness 200 nm with CO concentration of 1000 ppm at temperature of 350 oC (optimum operating temperature of SnO2 CO sensor [1, 10])...
...Increase in sensitivity of thin tin oxide films with thickness, for the CO detection has been recently reported [1]...

Keywords (9)

CO-sensing properties of undoped and doped tin oxide thin films prepared by electron beam evaporation,10.1016/j.talanta.2004.06.043,Talanta,S. M. A. D

Citation Context (2)

Grzegorz Halek, et al. Methods of selectivity improvements of semiconductor gas sensors

Sardar M. Ayub Durrani. Biasing Voltage Dependence of Sensitivity of Electron Beam Evaporated ...

References (1)

Optical Properties of Thin Solid Films (Citations: 563)

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