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A polymer-metal hybrid flexible mould and application for large area hot roller embossing

A polymer-metal hybrid flexible mould and application for large area hot roller embossing,10.1007/s00542-009-0991-2,Microsystem Technologies-micro-and

A polymer-metal hybrid flexible mould and application for large area hot roller embossing   (Citations: 1)
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In this paper, we report a novel approach to fabricate a low cost, large area and flexible mould and its applications in large area roller embossing. A liquid crystal polymer (LCP) film, which had a high glass transition temperature of 280°C, was clad with copper foils on both sides, was used as a starting material for mould fabrication. The LCP film and the copper foils were 50 and 36 μm thick, respectively. The LCP-Cu flexible mould was obtained through photolithographic patterning and wet etching of the copper foil on top surface of the LCP film. Using this proposed method, a polymer-metal hybrid flexible mould with an area of 150 mm × 150 mm was fabricated. The fabricated mould has a minimum feature size of 25 μm, and has been successfully used to demonstrate large area micro roller embossing. Micro channels, micro dots and micro mixers were embossed on polymeric as well as ceramic green substrates.
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    • ...A hybrid flexible mould made of LCP-Cu [13] was also fabricated by etching the copper foil that is pre-laminated on a liquid crystal polymer film, and used in UV R2R embossing for process study...
    • ...A LCP-Cu hybrid material, which is formed by laminating copper foils on both sides of a liquid crystal polymer film, is used to fabricate LCP-Cu hybrid flexible mould [13]...

    X. C. Shanet al. Process study on roll-to-roll ultraviolet (UV) embossing

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