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Laser interferometric measurement of displacement-field characteristics of piezoelectric actuators and actuator materials

Laser interferometric measurement of displacement-field characteristics of piezoelectric actuators and actuator materials,10.1016/S0924-4247(01)00591-

Laser interferometric measurement of displacement-field characteristics of piezoelectric actuators and actuator materials   (Citations: 7)
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The objective of this study was to provide an accurate and robust technique for the measurement of the displacement-field responses of piezoceramic actuator materials. Both “hard” and “soft” piezoceramic materials as bulk discs and multilayer devices were characterized. The main goal was to reduce the errors of measured displacements to less than 5%. The developed interferometric measurement system enabled the point-to-point scanning of multilayer actuators in which the interest was to study the edge effects in the interface of the high electric field loaded active and the passive regions. In addition to the developed Michelson interferometer system Moiré interferometer measurements were also carried out for multilayer device characterization.
Journal: Sensors and Actuators A-physical - SENSOR ACTUATOR A-PHYS , vol. 92, no. 1, pp. 326-334, 2001
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