Academic
Publications
Thermal and gas-sensing properties of planar-type micro gas sensor

Thermal and gas-sensing properties of planar-type micro gas sensor,10.1016/S0925-4005(99)00493-1,Sensors and Actuators B-chemical,Wan-Young Chung,Jun-

Thermal and gas-sensing properties of planar-type micro gas sensor   (Citations: 8)
BibTex | RIS | RefWorks Download
A new planar-type micro gas sensor in which a gas-sensing layer was surrounded by a platinum heater horizontally on the same plane of a diaphragm was proposed to fit well to forming the gas-sensing layer by wet processes like spin-coating. The planar-type sensor simply fabricated by using only three masks for the photolithography processes shows very uniform temperature distribution over sensing layer and the device attached with a spin-coated thin layer of metal oxide of SnO2, In2O3 or WO3 showed a reasonable sensing performance to gases at 300°C.
Journal: Sensors and Actuators B-chemical - SENSOR ACTUATOR B-CHEM , vol. 64, no. 1, pp. 118-123, 2000
Cumulative Annual
View Publication
The following links allow you to view full publications. These links are maintained by other sources not affiliated with Microsoft Academic Search.
Sort by: