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Traceable calibration of transfer standards for scanning probe microscopy

Traceable calibration of transfer standards for scanning probe microscopy,10.1016/j.precisioneng.2004.06.002,Precision Engineering-journal of The Inte

Traceable calibration of transfer standards for scanning probe microscopy   (Citations: 11)
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A Metrological Atomic Force Microscope (MAFM) has been constructed for the traceable calibration of transfer standards for scanning probe microscopy. It uses optical interferometry to generate image scales with direct traceability to the national standard of length. Three interferometers monitor the relative displacements of the AFM tip and sample in the x, y and z directions and the interferometer data is used directly to construct 3D images of sample surfaces. Traceable dimensional measurement of surface features may then be derived from the image data. This paper describes the MAFM instrument and presents a measurement uncertainty budget. Examples are given of measurements of pitch and step height on calibration transfer standards for scanning probe microscopy.
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    • ...For example at the NPL (NPL : National Physical Laboratory – Great Britain [1-2]), at the PTB and Ilmenau University (PTB: Physikalisch-Technische-Bundesanstalt - Germany [3-4]), at the METAS (Metas - Switzerland [5-6]), at the NIM (National Institute of Metrology - China [7]), at the NMJ (National Metrology of Japan [8-9]), at the NIST (National Institute of Standards and Technology - US [10-12]) and at the LNE (Laboratoire National de ...

    A. Sinnoet al. Enlarged Sample Holder for Optical AFM Imaging: Millimeter Scanning wi...

    • ...Only a small percentage of AFMs are suitable for extracting dimensions such as distance between features with a small or even known uncertainty [2-7]...

    J. E. Deckeret al. Developments in Metrology in Support of Nanotechnology

    • ...For example at the NPL (NPL : National Physical Laboratory – Great Britain [1-2]), at the PTB and Ilmenau University (PTB: Physikalisch-Technische-Bundesanstalt - Germany [3-4]), at the METAS (Metas - Switzerland [5-6]), at the NIM (National Institute of Metrology - China [7]), at the NMJ (National Metrology of Japan [8-9]), at the NIST (National Institute of Standards and Technology - US [10-12]) and at the LNE (Laboratoire National de ...

    A. Sinnoet al. Enlarged sample holder for optical AFM imaging: Millimeter scanning wi...

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