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Uniformity of PZT Thin Films Prepared by MOCVD on 8"B Substrate

Uniformity of PZT Thin Films Prepared by MOCVD on 8"B Substrate,10.1080/10584580215388,Integrated Ferroelectrics,Takeshi Masuda,Masahiko Kajinuma,Taka

Uniformity of PZT Thin Films Prepared by MOCVD on 8"B Substrate  
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Journal: Integrated Ferroelectrics - INTEGR FERROELECTRICS , vol. 46, no. 1, pp. 65-77, 2002
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