Author | Conference | Journal | Organization | Year | DOI
Look for results that meet for the following criteria:
Academic
Publications
Parametrically amplified thermal resonant sensor with pseudo-cooling effect

Parametrically amplified thermal resonant sensor with pseudo-cooling effect,10.1088/0960-1317/15/12/010,Journal of Micromechanics and Microengineering

Edit
Parametrically amplified thermal resonant sensor with pseudo-cooling effect   (Citations: 10)
BibTex | RIS | RefWorks Download
In this paper, a resonating thermal sensor with the capability of de-amplifying thermal noises based on mechanical parametric amplification is presented. A single-crystalline silicon resonator is formed at the edge of an absorber that is freely suspended by narrow beams, and the resonant frequency of the resonator is changed by both heat conduction and thermal stress in irradiating IR radiation. An electrode for electrostatically vibrating near the resonant frequency is integrated, and two electrodes for electrostatically exciting parametric amplification are also formed near the resonator. We propose a scheme in which the frequency fluctuation of the mechanical vibration can be reduced by noise-squeezing involved in parametric amplification under an appropriate condition, resulting in improvement of the noise equivalent power and normalized detectivity. In this research, the prototype of thermal resonant IR sensors was fabricated in order to verify the scheme of the noise-squeezing, and currently parametric resonance with the noise-squeezing in the resonator is confirmed and the fundamental characteristics of the prototype are reported.
Journal: Journal of Micromechanics and Microengineering - J MICROMECHANIC MICROENGINEER , vol. 15, no. 12, pp. 2282-2288, 2005
Cumulative Annual
View Publication
The following links allow you to view full publications. These links are maintained by other sources not affiliated with Microsoft Academic Search.
Sort by:

Citations (10)

Share this on