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In situ tuning of a MEMS microphone using electrodeposited nanostructures

In situ tuning of a MEMS microphone using electrodeposited nanostructures,10.1088/0960-1317/19/3/035015,Journal of Micromechanics and Microengineering

In situ tuning of a MEMS microphone using electrodeposited nanostructures  
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