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Novel top-gate zinc oxide thin-film transistors (ZnO TFTs) for AMLCDs

Novel top-gate zinc oxide thin-film transistors (ZnO TFTs) for AMLCDs,10.1889/1.2451545,Takashi Hirao,Mamoru Furuta,Hiroshi Furuta,Tokiyoshi Matsuda,T

Novel top-gate zinc oxide thin-film transistors (ZnO TFTs) for AMLCDs   (Citations: 15)
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Published in 2007.
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    • ...Therefore, ZnO TFTs have been actively studied and extensively developed not only for flat-panel displays [3], [4] but also for image sensors [5] and transparent electronics [6], [7]...
    • ...Deposition methods for ZnOfilms are pulsed laser deposition [21], [22], atomic layer deposition [23], [24], direct-current or radio-frequency (RF) sputtering [1], [3], [25], [26], etc...

    Mutsumi Kimuraet al. Extraction of Trap Densities in ZnO Thin-Film Transistors and Dependen...

    • ...It has been verified that ZnO TFTs have a higher mobility than amorphous silicon TFTs [8]‐[11]...

    Mamoru Furutaet al. Analysis of Hump Characteristics in Thin-Film Transistors With ZnO Cha...

    • ...To solve this problem, we chose zinc oxide (ZnO) [7] for the semiconductive layer of the TFT circuit...

    Satoshi Aiharaet al. Stacked Image Sensor With Green and Red-Sensitive Organic Photoconduct...

    • ...TFTs has recently been demonstrated as higher than that of a-Si:H TFTs [4]‐[10]...
    • ...We have already proposed novel top-gate ZnO-TFT fabrication process based on the photolithography and etching processes and first demonstrated a 1.46-in diagonal LCD panel with 61600 pixels addressed by top-gate ZnO TFTs having a field-effect mobility of over 50 cm 2 · (V · s) −1 [10]...
    • ...The ZnO films were deposited by RF (13.56 MHz) planar magnetron sputtering on a glass substrate at 150 ◦ C. The schematic configuration of the sputtering apparatus used in this experiment was reported in previous papers [10]‐[13]...
    • ...Display size and specifications of fabricated LCD was the same as the previously demonstrated LCD [10]...
    • ...A drain‐current uniformity of ±7% was achieved within a 2-in diameter; thus, the picture quality of fabricated LCD driven by the ZnO TFTs was drastically improved, and pixel defects were drastically reduced as compared to the previously demonstrated LCD driven by the top-gate ZnO TFTs [10]...

    Takashi Hiraoet al. Bottom-Gate Zinc Oxide Thin-Film Transistors (ZnO TFTs) for AM-LCDs

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