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Improvement of the MEMS bionic vector hydrophone

Improvement of the MEMS bionic vector hydrophone,10.1016/j.mejo.2011.01.002,Microelectronics Journal,Guojun Zhang,Panpan Wang,Linggang Guan,Jijun Xion

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Improvement of the MEMS bionic vector hydrophone   (Citations: 1)
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A kind of MEMS vector hydrophone with bionics structure was introduced in 2007. As the acoustic–electric transducer structure and the acoustic package of hydrophone have been optimized, the performance of the hydrophone has been greatly improved compared with the previous. This hydrophone calibration was completed in the National Defense Underwater Acoustics Calibration Laboratory of China. According to the test results, the sensitivity of the hydrophone is −165dB (including pre-amplification 20dB), the frequency response ranges from 20Hz to 2kHz (±5dB), and this hydrophone has a good directional pattern in the form of “8”-shape.
Journal: Microelectronics Journal , vol. 42, no. 5, pp. 815-819, 2011
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