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(MeCp)Ir(CHD) and molecular oxygen as precursors in atomic layer deposition of iridium

(MeCp)Ir(CHD) and molecular oxygen as precursors in atomic layer deposition of iridium,10.1039/c0jm00486c,Journal of Materials Chemistry,Jani Hämäläin

(MeCp)Ir(CHD) and molecular oxygen as precursors in atomic layer deposition of iridium  
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Journal: Journal of Materials Chemistry - J MATER CHEM , vol. 20, no. 36, 2010
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