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Overview of gate linewidth control in the manufacture of CMOS logic chips

Overview of gate linewidth control in the manufacture of CMOS logic chips,10.1147/rd.391.0189,Ibm Journal of Research and Development,Donald G. Cheseb

Overview of gate linewidth control in the manufacture of CMOS logic chips   (Citations: 13)
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Journal: Ibm Journal of Research and Development - IBMRD , vol. 39, no. 1-2, pp. 189-200, 1995
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