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Thermal conductivity and its anisotropy research of germanium thin film

Thermal conductivity and its anisotropy research of germanium thin film,10.1007/s00231-010-0731-2,Heat and Mass Transfer,Z. H. Wang,M. J. Ni

Thermal conductivity and its anisotropy research of germanium thin film   (Citations: 2)
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Germanium is an important element in semiconductor and microelectronics industries. Its thermal conductivity is an invariable and isotropic parameter in germanium crystal in the same temperature and its thermal conductivity is difficult to be measured in thin film. In the present paper, using the non-equilibrium molecular dynamics simulation method and Stillinger–Weber potential model, the normal and tangential thermal conductivity of germanium thin film are studied. There are remarkable anisotropy and size effect of thermal conductivity in normal and tangential direction of germanium thin film. In the theoretical analysis, Boltzmann transport theory is used to analyze the phonon transport in germanium thin film. Theoretical results further demonstrate the anisotropy and size effect of thermal conductivity in thin film, which indicate the significant decrease of phonon mean free path and predominant boundary phonon scattering in germanium thin film.
Journal: Heat and Mass Transfer - HEAT MASS TRANSFER , vol. 47, no. 4, pp. 449-455, 2011
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