A novel technique for reconditioning polycrystalline diamond tool surfaces applied for silicon micromachining,10.1016/j.cirp.2011.03.013,Cirp Annals-m

A novel technique for reconditioning polycrystalline diamond tool surfaces applied for silicon micromachining


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The demand for micromachining methods for single crystal silicon has been steadily increasing. Micro tools made from polycrystalline diamond (PCD) have considerable promise in this regard. However, it has been a concern that contamination of the PCD tool surface can give rise to an increase in frictional resistance during machining, leading to degradation of the surface integrity of the workpiece. In this study, the feasibility of surface reconditioning using a specific electrochemical technique was investigated. The technique was found to be effective in removing surface contamination without causing any damage to the tool edges.

Journal: Cirp Annals-manufacturing Technology - CIRP ANN-MANUF TECHNOL , vol. 60, no. 1, pp. 591-594, 2011

DOI: 10.1016/j.cirp.2011.03.013

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A novel technique for reconditioning polycrystalline diamond tool surfaces applied for silicon micromachining,10.1016/j.cirp.2011.03.013,Cirp Annals-m

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