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Surface micromachining: from vision to reality to vision [accelerometer]

Surface micromachining: from vision to reality to vision [accelerometer],10.1109/ISSCC.1995.535506,R. S. Payne,S. Sherman,S. Lewis,R. T. Howe

Surface micromachining: from vision to reality to vision [accelerometer]   (Citations: 8)
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Airbag deployment systems demand reliable, inexpensive sensing of deceleration of the car during collision. The integrated accelerometer combines a 0.3 mm2 micromechanical capacitive sensing element with precision bipolar/MOS control circuitry in a 9 mm2 area. The microstructure is fabricated from a layer of deposited polysilicon by surface micromachining. This chip is an A/V (acceleration-to-voltage) functional block for accelerations of 1 to 50 g. This paper reviews the rationale for surface micromachining the sensing element, the BiMOS2C integrated process, the sense and control circuit architecture, and performance of the chip
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