Academic
Publications
Anodic bonding technique under low-temperature and low-voltage using evaporated glass

Anodic bonding technique under low-temperature and low-voltage using evaporated glass,10.1109/IVMC.1996.601857,Woo-Beom Choi,Byeong-Kwon Ju,Seong-Jae

Anodic bonding technique under low-temperature and low-voltage using evaporated glass  
BibTex | RIS | RefWorks Download
We have performed silicon-to-silicon anodic bonding using a glass layer deposited by electron beam evaporation. Wafers can be bonded at 135°C with an applied voltage of 35 VDC, which enables application of this technique to the vacuum packaging of microelectronic devices, because its bonding temperature and voltage are low. From the experimental results, we have found that an evaporated glass layer more than 1 μm thick was suitable for anodic bonding. We have also investigated the possibility of an evaporated glass layer as an insulating layer as well as a bonding layer
Cumulative Annual
View Publication
The following links allow you to view full publications. These links are maintained by other sources not affiliated with Microsoft Academic Search.