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Keywords
(8)
Band Gap
Gallium Nitride
Raman Spectroscopy
Silicon Wafer
Surface Structure
Thin Film
Yag Laser
Laser Lift Off
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Raman spectroscopy study on free-standing GaN separated from sapphire substrates by 532 nm Nd:YAG laser lift-off
Raman spectroscopy study on free-standing GaN separated from sapphire substrates by 532 nm Nd:YAG laser lift-off,10.1109/HKEDM.2002.1029169,H. P. Ho,K
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Raman spectroscopy study on free-standing GaN separated from sapphire substrates by 532 nm Nd:YAG laser lift-off
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H. P. Ho
,
K. C. Lo
,
G. G. Siu
,
C. Surya
Gallium nitride
(GaN) thin films grown on sapphire substrates were successfully lifted onto silicon wafers using a laser lift-off (LLO) process induced by a 532 nm, Nd:YAG pulsed laser. Although the photon energy (2.33 eV) is much lower than the
band gap
of hexagonal GaN (3.41 eV), free-carriers absorption can heat up and consequently causes detachment of the GaN film from the sapphire substrate. Raman measurement conducted before and after LLO showed that the
surface structure
of the lifted GaN changed from hexagonal to a cubic structure.
Conference:
Proceedings IEEE Hong Kong Electron Devices Meeting - HKEDM
, 2002
DOI:
10.1109/HKEDM.2002.1029169
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