Mechanism of PFC reduction with gas circulation RIE system
We study theoretical calculation and experimentally verify of gas reduction rate with using gas circulation RIE system. 40% reduction of PFC gases is expected as a result of trial calculation, and we successfully achieve significant reduction of PFC gases in dual damascene etching process. Consumption PFC gases are 40-80% reduction, and emission PFC gases are 70-80% reduction. We clarified that the variable factors of reduction rate is largely a result of usage gas kind.