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(9)
Filter Design
Focused Ion Beam
High Speed
Oscillations
Plasma Etching
Thermal Analysis
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A MEMS-based quartz resonator technology for GHz applications
A MEMS-based quartz resonator technology for GHz applications,10.1109/FREQ.2004.1418425,Frederic P. Stratton,David T. Chang,Deborah J. Kirby,Richard J
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A MEMS-based quartz resonator technology for GHz applications
(
Citations: 9
)
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Frederic P. Stratton
,
David T. Chang
,
Deborah J. Kirby
,
Richard J. Joyce
,
Tsung-Yuan Hsu
,
Randall L. Kubena
,
Yook-Kong Yong
We report on the development of a new MEMS quartz resonator technology that allows for the processing and integration of VHF to UHF high-Q oscillators and filters with high-speed silicon or III-V electronics. The paper describes the successful demonstration of new
wafer bonding
and dry
plasma etching
processes that make quartz-MEMS technology possible. We present impedance, Q, and temperature sensitivity data along with comparison to 3D harmonic and
thermal analysis
of VHF-UHF resonators. We also show Coventor simulation data of our first two- and three-pole monolithic crystal filter designs as well as a filter array layout which facilitates integration with front-end RF electronics and switches. Finally, we demonstrate a mechanical tuning technique for our resonators utilizing focused-ion-beam (FIB) technology.
Conference:
IEEE International Frequency Control Symposium - FCS
, pp. 27-34, 2004
DOI:
10.1109/FREQ.2004.1418425
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Citation Context
(6)
...In addition, the devices of rows 2 and 3 illustrate strategies for lowering the impedances of stand-alone resonators, the first based on enlargement of the electrode-to-resonator capacitive overlap area to increase electromechanical coupling [31], [32] (i.e., increasing Ao in (2)); and the second dispensing with capacitive transducers, and using piezoelectric transducers [33], [
34
], with the latter being the more successful in achieving ...
Clark T.-C. Nguyen
.
MEMS technology for timing and frequency control
...The asymmetric thickness shear mode is common in quartz resonators, excited by the application of an ac signal across electrodes on opposing faces of a quartz crystal [
8
]...
Hengky Chandrahalim
,
et al.
High κ dielectrically transduced MEMS thickness shear mode resonators ...
...Recent advancements in micro fabrication and processing techniques, especially in the areas of precision wafer bonding and plasma etching, have provided a method for fabricating miniaturized quartz on-chip resonators working in the VHF-UHF frequency range [
11
] and [
12
]...
Yook-Kong Yong
,
et al.
Effects of Thermal Stresses on the Frequency-Temperature Behavior of P...
...Manyof these results havebeenreported previously [
4
]...
...Monolithic crystal filters havebeenfabricated using the design methodology described previously [
4
]...
R. L. Kubena
,
et al.
Next Generation Quartz Oscillators and Filters for VHF-UHF Systems
...The asymmetric thickness shear mode is common in quartz resonators, excited by the application of an AC signal across electrodes on opposing faces of a quartz crystal [
5
]...
...Hz is within a factor of five of the f-Q product for quartz resonators [
5
]...
Hengky Chandrahalim
,
et al.
Thickness shear mode vibrations in silicon bar resonators
References
(5)
Frequency-selective MEMS for miniaturized low-power communication devices
(
Citations: 81
)
Clark T.-C. Nguyen
Journal:
IEEE Transactions on Microwave Theory and Techniques - IEEE TRANS MICROWAVE THEORY
, vol. 47, no. 8, pp. 1486-1503, 1999
Optimized DRIE etching of ultra-small quartz resonators
(
Citations: 4
)
David T. Chang
,
Frederic P. Stratton
,
Randall L. Kubena
,
Richard J. Joyce
Conference:
IEEE International Frequency Control Symposium - FCS
, pp. 829-832, 2003
One-chip multichannel quartz crystal microbalance (QCM) fabricated by Deep RIE
(
Citations: 34
)
Takashi Abe
,
Masayoshi Esashi
Journal:
Sensors and Actuators A-physical - SENSOR ACTUATOR A-PHYS
, vol. 82, no. 1, pp. 139-143, 2000
Chemically-milled UHF SC-cut resonators
(
Citations: 8
)
R. C. Smythe
,
R. B. Angove
Conference:
IEEE International Frequency Control Symposium - FCS
, 1988
Analysis of overtone modes in monolithic crystal filters
(
Citations: 7
)
H. F. Tiersten
Journal:
Journal of The Acoustical Society of America - J ACOUST SOC AMER
, vol. 62, no. 6, 1977
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Citations
(9)
MEMS technology for timing and frequency control
(
Citations: 101
)
Clark T.-C. Nguyen
Journal:
IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control - IEEE T ULTRASON FERROELECTR
, vol. 54, no. 2, pp. 251-270, 2007
High κ dielectrically transduced MEMS thickness shear mode resonators and tunable channel-select RF filters
(
Citations: 6
)
Hengky Chandrahalim
,
Dana Weinstein
,
Lih Feng Cheow
,
Sunil A. Bhave
Journal:
Sensors and Actuators A-physical - SENSOR ACTUATOR A-PHYS
, vol. 136, no. 2, pp. 527-539, 2007
Effects of Thermal Stresses on the Frequency-Temperature Behavior of Piezoelectric Resonators
(
Citations: 6
)
Yook-Kong Yong
,
Mihir Patel
,
Masako Tanaka
Journal:
Journal of Thermal Stresses - J THERMAL STRESSES
, vol. 30, no. 6, pp. 639-661, 2007
Next Generation Quartz Oscillators and Filters for VHF-UHF Systems
(
Citations: 1
)
R. L. Kubena
,
F. P. Stratton
,
D. T. Chang
,
R. J. Joyce
,
T. Y. Hsu
,
M. K. Lim
,
R. T. M'Closkey
Conference:
Microwave, MTT-S International Symposium - MTT
, pp. 668-671, 2006
Conceptual Designs of a High Q, 3.4 GHz Thin Film Quartz Resonator
Mihir S Patel
,
Yook-Kong Yong
Conference:
IEEE International Frequency Control Symposium - FCS
, 2006