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Multi-axis integrated CMOS-MEMS inertial sensors

Multi-axis integrated CMOS-MEMS inertial sensors,10.1109/ICSICT.2010.5667618,Huikai Xie,Hongzhi Sun,Kemiao Jia,Deyou Fang,Hongwei Qu

Multi-axis integrated CMOS-MEMS inertial sensors  
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Multi-axis integration of inertial sensors is crucial for portable electronics. This paper presents a DRIE CMOS MEMS process that is capable of realizing lateral and vertical sensing comb drives. An integrated 3-axis accelerometer and an integrated 5-axis inertial measurement unit including a 3-axis accelerometer, a z-axis gyroscope and an x/y gyroscope are also introduced.
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