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Skin-type tactile sensor using standing piezoresistive cantilever for micro structure detection

Skin-type tactile sensor using standing piezoresistive cantilever for micro structure detection,10.1109/ICSENS.2010.5690342,Kentaro Noda,Kiyoshi Matsu

Skin-type tactile sensor using standing piezoresistive cantilever for micro structure detection  
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We propose a skin-type tactile sensor with standing piezoresistive cantilever to detect micro size texture of object. By forming micro ridges to the sensor surface as a finger print, the sensitivity of the tactile sensor increased for micro texture scanning. This characteristic enabled the detection of 500nm high 300μm wide bumps arranged with 50μm pitch on a flat surface. This result shows the efficiency of proposed sensor for human like texture detection.
Conference: IEEE - SENSORS , pp. 2089-2092, 2010
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