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Calibration accuracy of a 625 GHz on-wafer probe

Calibration accuracy of a 625 GHz on-wafer probe,10.1109/ARFTG76.2010.5700054,Theodore J. Reck,Lihan Chen,Chunhu Zhang,Alex Arsenovic,Arthur Lichtenbe

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Calibration accuracy of a 625 GHz on-wafer probe (Citations: 3)


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The accuracy of an on-wafer probe system operating at 625 GHz is analyzed. A weighted least squares analysis is applied to the calibration of a one-port measurement system to propagate the non-systematic errors introduced by probe contact and probe placement variation. The worst-case errors of the 625 GHz on-wafer probe system are found and the combined effects of the VNA extender's power drop-out at the low end of the band with the poor matching of the probe at the high-end results in the 625 GHz probe system being most accurate in the center of the WR-1.5 waveguide band. Between 560 and 625 GHz the worst case error is 0.26 in linear magnitude and 15° in phase for a 0 dB reflection.

Conference: ARFTG Conference - ARFTG , 2010

DOI: 10.1109/ARFTG76.2010.5700054

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Citation Context (2)

- ...The uncertainty in this measurement is due to positioning error and noise in the network analyzer and can be quantified by the method detailed in [7]...
Lihan Chen, et al. Terahertz micromachined on-wafer probes: Repeatability and robustness
- ...If variation in the alignment of the probe to the standards and the repeatability of the probe placement is taken into account an uncertainty of 1.2 dB in at 625 GHz is expected [10]...
- ...The maximum variation from the expected value of the magnitude is 3.3 dB and the phase is 30 . These discrepancies are at the upper end of the frequency band, where the insertion loss of the probe increases substantially, resulting in lower accuracy [10]...
Theodore J. Reck, et al. Micromachined Probes for Submillimeter-Wave On-Wafer Measurements—Part...

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Keywords (3)

Calibration accuracy of a 625 GHz on-wafer probe,10.1109/ARFTG76.2010.5700054,Theodore J. Reck,Lihan Chen,Chunhu Zhang,Alex Arsenovic,Arthur Lichtenbe

Citation Context (2)

Lihan Chen, et al. Terahertz micromachined on-wafer probes: Repeatability and robustness

Theodore J. Reck, et al. Micromachined Probes for Submillimeter-Wave On-Wafer Measurements—Part...

References (11)

Solid-state amplifiers for terahertz electronics (Citations: 12)

THz MMICs based on InP HBT Technology (Citations: 14)

Transistor Level Modeling for Analog/RF IC Design (Citations: 5)

Demonstration of a 0.48 THz Amplifier Module Using InP HEMT Transistors (Citations: 14)

Micromachined on-wafer probes (Citations: 7)

Citations (3)

Terahertz micromachined on-wafer probes: Repeatability and robustness (Citations: 3)

Micromachined Probes for Submillimeter-Wave On-Wafer Measurements—Part II: RF Design and Characterization (Citations: 1)

A Micromachined Terahertz Waveguide 90 $^{\circ}$ Twist


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