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Measurement of the taper angle and X-ray reflectivity of MEMS-based silicon mirrors
Measurement of the taper angle and X-ray reflectivity of MEMS-based silicon mirrors,10.1109/OMEMS.2011.6031068,Tomohiro Ogawa,Yuichiro Ezoe,Teppei Mor
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Measurement of the taper angle and X-ray reflectivity of MEMS-based silicon mirrors
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Tomohiro Ogawa
,
Yuichiro Ezoe
,
Teppei Moriyama
,
Takaya Ohashi
,
Ikuyuki Mitsuishi
,
Kazuhisa Mitsuda
,
Yoshiaki Kanamori
,
Hitomi Yamaguchi
,
Raul Riveros
Conference:
IEEE/LEOS International Conference on Optical - MEMS
, pp. 167-168, 2011
DOI:
10.1109/OMEMS.2011.6031068
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