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Fine thickness control of amorphous silicon by wet-etching for low loss wire waveguide

Fine thickness control of amorphous silicon by wet-etching for low loss wire waveguide,10.1109/GROUP4.2011.6053732,Katsumi Furuya,Youichi Sakakibara,K

Fine thickness control of amorphous silicon by wet-etching for low loss wire waveguide  
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