Robust Repetitive Controller for Fast AFM Imaging

Robust Repetitive Controller for Fast AFM Imaging,10.1109/TNANO.2011.2106797,IEEE Transactions on Nanotechnology,Serkan Necipoglu,Selman A. Cebeci,Yun

Robust Repetitive Controller for Fast AFM Imaging  
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Currently, atomic force microscopy (AFM) is the most preferred scanning probe microscopy method due to its numerous advantages. However, increasing the scanning speed and reduc- ing the interaction forces between the probe's tip and the sample surface are still the two main challenges in AFM. To meet these challenges, we take advantage of the fact that the lateral move- ments performed during an AFM scan are a repetitive motion and propose a repetitive controller (RC) for the z-axis movements of the piezoscanner. The RC utilizes the profile of the previous scan line while scanning the current line to achieve a better scan per- formance. The results of the scanning experiments performed with our AFM setup show that the proposed RC significantly outper- forms a conventional PI controller that is typically used for the same task. The scan error and the average tapping forces are re- duced by 66% and 58%, respectively, when the scanning speed is increased by sevenfold. Index Terms—Atomic force microscopy (AFM), nanoscanning, repetitive controller (RC), system identification.
Journal: IEEE Transactions on Nanotechnology - IEEE TRANS NANOTECHNOL , vol. 10, no. 5, pp. 1074-1082, 2011
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