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Carbon Nanotube-Based CMOS Gas Sensor IC: Monolithic Integration of Pd Decorated Carbon Nanotube Network on a CMOS Chip and Its Hydrogen Sensing

Carbon Nanotube-Based CMOS Gas Sensor IC: Monolithic Integration of Pd Decorated Carbon Nanotube Network on a CMOS Chip and Its Hydrogen Sensing,10.11

Carbon Nanotube-Based CMOS Gas Sensor IC: Monolithic Integration of Pd Decorated Carbon Nanotube Network on a CMOS Chip and Its Hydrogen Sensing  
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The integration of carbon nanotube (CNT)-based sensor and readout complementary metal-oxide-semiconductor integrated chip (CMOS IC) to detect hydrogen gas in a single chip is presented. First, we have fabricated the CMOS IC us- ing the standard 0.35-µm CMOS process. Then, we have built 8 × 8 CNT-based sensor cells on it using a proposed tractable postprocessing strategy and judicious electrode scheme. The fab- ricated sensor IC can operate down to 10-ppm concentration of hydrogen in air as a hydrogen sensor. This paper is expected to have a major impact upon the integration of the CNT technology with CMOS technology and be extended to the development of CMOS IC integrated with various nanomaterials.
Journal: IEEE Transactions on Electron Devices - IEEE TRANS ELECTRON DEVICES , vol. 58, no. 10, pp. 3604-3608, 2011
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