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Sputtering of SmCo Thin Films and Integration Into a Ferrofluidic Microactuator

Sputtering of SmCo Thin Films and Integration Into a Ferrofluidic Microactuator,10.1109/TMAG.2011.2147290,IEEE Transactions on Magnetics,Jue Chen,Domi

Sputtering of SmCo Thin Films and Integration Into a Ferrofluidic Microactuator  
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Journal: IEEE Transactions on Magnetics - IEEE TRANS MAGN , vol. 47, no. 10, pp. 4473-4476, 2011
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