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Development and Testing of a Multilevel Chevron Actuator-Based Positioning System

Development and Testing of a Multilevel Chevron Actuator-Based Positioning System,10.1109/JMEMS.2011.2167674,IEEE/ASME Journal of Microelectromechanic

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Development and Testing of a Multilevel Chevron Actuator-Based Positioning System  
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Journal: IEEE/ASME Journal of Microelectromechanical Systems - J MICROELECTROMECHANICAL SYST , vol. 20, no. 6, pp. 1298-1309, 2011
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