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Spatial Light Phase Modulator With Bidirectional Tilt–Piston Micromirror Array—Part I: Principle and Design

Spatial Light Phase Modulator With Bidirectional Tilt–Piston Micromirror Array—Part I: Principle and Design,10.1109/JMEMS.2010.2090496,IEEE/ASME Journ

Spatial Light Phase Modulator With Bidirectional Tilt–Piston Micromirror Array—Part I: Principle and Design  
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