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HIGH-PERFORMANCE CONTROL OF A PZT SCANNER

HIGH-PERFORMANCE CONTROL OF A PZT SCANNER,B. Bhikkaji,M. Ratnam,A. J. Fleming,S. O. R. Moheimani

HIGH-PERFORMANCE CONTROL OF A PZT SCANNER   (Citations: 1)
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A piezoelectric tube of the type typically used for actuation in Scanning Tunneling Microscopes (STMs) and Atomic Force Microscopes (AFMs) is considered. Actua- tion of this piezoelectric tube is hampered by the presence of a lightly damped low frequency resonant mode. This resonant mode is first identified and then damped using a Positive Velocity and Position Feedback (PVPF) controller, a control technique which is proposed in this paper. Inputs are then shaped such that the closed loop system tracks a raster pattern.
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