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Fast fabrication of long-range ordered porous alumina membranes by hard anodization

Fast fabrication of long-range ordered porous alumina membranes by hard anodization,10.1038/nmat1717,Nature Materials,Woo Lee,Ran Ji,Ulrich Gösele,Kor

Fast fabrication of long-range ordered porous alumina membranes by hard anodization   (Citations: 111)
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Nanoporous anodic aluminium oxide has been widely used for the development of various functional nanostructures. So far these self-organized pore structures could only be prepared within narrow processing conditions. Here we report a new oxalic-acid-based anodization process for long-range ordered alumina membranes. This process is a new generation of the so-called `hard anodization' approach that has been widely used in industry for high-speed fabrication of mechanically robust, very thick (>100mum) and low-porosity alumina films since the 1960s. This hard anodization approach establishes a new self-ordering regime with interpore distances, (Dint)=200-300nm, which have not been achieved by mild anodization processes so far. It offers substantial advantages over conventional anodization processes in terms of processing time, allowing 2,500-3,500% faster oxide growth with improved ordering of the nanopores. Perfectly ordered alumina membranes with high aspect ratios (>1,000) of uniform nanopores with periodically modulated diameters have been realized.
Journal: Nature Materials - NAT MATER , vol. 5, no. 9, pp. 741-747, 2006
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