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...the metallization layers required for a silicon-based reflective liquid crystal light valve have been developed and integrated...display. the process is based on a medium-voltage cmos process and uses six masks (for three metal levels, one via level, and two insulator...
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...the investigation of thin viscoelastic layers coated with a highly reflective top electrode is surveyed. such layers find
applications in active-matrix-addressed spatial light modulators that are of potential use for the light-valve projection
of high-resolution images, for input devices of optical information...
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...fabrication of monolithic active matrices for addressing metallized viscoelastic light-valve control layers are described together with the...identical matrix samples coated with metallized viscoelastic control layers were successfully demonstrated as spatial light modulators for the read-out light from a xenon arc lamp...
Journal: Displays
, vol. 16, no. 1, pp. 21-26, 1995
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...describes the design of reticles for gxga resolution with on-chip drivers. the chip size associated with this resolution...sub-halfmicron processing steps: two metallization layers with a 500nm-feature size for the light shielding function resp. mirroring function...
Published in 2000.
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...crystal above that pixel to reflect the light back through the polarizer, which also blocks light from the losing units. meanwhile, the undifhcted light that has passed through the...the glass and liquid crystal layers and saikes the electrode mirror on the surface of the ic. light which is not reflected by the metallic electrode is absorbed by a...
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...label small particles or beads for use in high-throughput screening and bioassay applications focus on either spatially differentiated, on-chip arrays or random distributions of...signatures, quantum dots, or discrete metallic layers. here we report a method for optically encoding micrometre-sized nanostructured...
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...of disorder in the surface layer and the degree of doping by te, si, and cr impurities on the resonance raman scattering of light in gaas. the resonance raman...inhomogeneous lattice deformations and stresses on the surface which was mirrorlike with respect to its external form. inhomogeneous deformations, on the one hand, reduce the local symmetry...
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...development of multi-level lab-on-a-chip devices that use integrated optics...groove waveguides in the optical layer is coupled to the fluidic layer by reflection from metallized reflective planes. the fluidic layer is constructed of polydimethylsiloxane (pdms...
Published in 2007.
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...paper is a novel approach for the fabrication of low-cost integrated micromachined spatial light modulators based on electrostatic deformation of viscoelastic layers. the fabrication procedure is optimized...stop and a 80nm aluminum layer for reflectivity and conductivity. when alternating potentials are applied on the electrode structure, the surface...
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...which form both ohmic and reflective multilayer contacts for flip-chip light-emitting diode applications are examined...found to result in poor reflectance (63% at the wavelength of 465 nm). the authors propose a two step metallization method, the ni/ag double layer is first deposited/annealed followed...